An Alternating Direction Method of Multipliers for Inverse Lithography Problem

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چکیده

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ژورنال

عنوان ژورنال: Numerical Mathematics-theory Methods and Applications

سال: 2023

ISSN: ['1004-8979', '2079-7338']

DOI: https://doi.org/10.4208/nmtma.oa-2022-0151